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Nanolithography

Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures, meaning patterns with at least one lateral dimension between 1 and 100 nm.
Nanolithography is the art and science of etching, writing, or printing at the microscopic level, where the dimensions of characters are on the order of nanometers (units of 10 -9 meter, or millionths of a millimeter).

Related Journals of Nanolithography
Nano Research, Scripta Materialia, Nanoscale, Lab on a Chip - Miniaturisation for Chemistry and Biology

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