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A novel bonding method for the nanochannels based on PDMS spin-coating
16th World Medical Nanotechnology Congress
September 03-04, 2018 Tokyo, Japan

Zhifu Yin and Xue Yang

Jilin University, China

Posters & Accepted Abstracts: J Nanomed Nanotechnol

Abstract:

All polymer-based nanofluidic chips are becoming increasingly important for biological and medical applications. Future advances in nanofluidics and its utilization in commercial applications depend on the development and fabrication of low cost and high fidelity nanofluidic chips. It is easy to improve replication precision of nano-trenches by means of increasing imprinting temperature, pressure and duration. However, without the support of nano-mold, the replicated nanochannels are apt to block after bonding process. The fabrication of high fidelity nanofluidic chips depends on bonding process rather than imprinting process. This work presents a novel bonding method for nanochannels based on PDMS spin-coating. With optimized parameters, the size of the nanochannels can be decreased by 67% after PDMS spin-coating. Experimental results show that 60 nm (both for width and depth) nanochannels with high uniformity can be fabricated without any block.

Biography :

Zhifu Yin has completed his PhD from Dalian University of Technology. He is a Lecturer at Jilin University. He has published more than 30 papers in reputed journals and has been serving as a Reviewer for more than 5 reputed journals.

E-mail: yinzf@jlu.edu.cn